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US 8,770,727 B2Granted
Piezoelectric element, piezoelectric actuator, liquid ejecting head and liquid ejecting apparatus
AssigneeSeiko Epson Corporation
InventorMasao Nakayama
Life of this patent
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Abstract
A piezoelectric element includes a first electrode, a first piezoelectric layer which is formed at an upper side of the first electrode and at lateral sides to the first electrode, a porous layer which is formed so as to cover side surfaces of the first piezoelectric layer, and a second electrode which is formed at an upper side of the first piezoelectric layer and the porous layer. In the piezoelectric element, the porous layer contains at least one metal element constituting the first piezoelectric layer.
Claims19
A piezoelectric element comprising:
- a first electrode;
- a first piezoelectric layer which is formed at an upper side of the first electrode and at lateral sides to the first electrode;
- a porous layer which is formed so as to cover side surfaces of the first piezoelectric layer;
- and
- a second electrode which is formed at an upper side of the first piezoelectric layer and the porous layer,
- wherein the porous layer contains at least one metal element constituting the first piezoelectric layer, the porous layer comprising a plurality of fine holes that thereby cause the layer to be porous.
3 more elements
Dependencies are inferred from the claim text.