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US 8,770,723 B2Granted
Piezoelectric element, liquid ejecting head, and liquid ejecting apparatus
AssigneeSeiko Epson Corporation
InventorsTomohiro Sakai, Koichi Morozumi, Tsutomu Asakawa
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Abstract
A piezoelectric element comprises a electrode and a piezoelectric layer made of a complex oxide having a perovskite structure containing at least bismuth, barium, iron, and titanium. A layered compound containing iron, barium, titanium and oxygen is formed between the piezoelectric layer and the electrode.
Claims8
A piezoelectric element comprising:
- a first electrode;
- a second electrode;
- and
- a layered compound;
- and
- a piezoelectric layer made of a complex oxide having a perovskite structure containing at least bismuth, barium, iron, and titanium;
- wherein the layered compound contains iron, barium, titanium and oxygen and is formed between the piezoelectric layer and the first electrode and
- wherein the piezoelectric layer is formed between the layered compound and the second electrode, and
- wherein the layered compound is preferentially oriented along the (001) plane.
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A method for forming a piezoelectric element, the method comprising:
- forming a first electrode;
- forming a layered compound on the first electrode, the layered compound containing iron, barium, titanium and oxygen;
- forming a piezoelectric layer on the layered compound, wherein the piezoelectric layer is made of a complex oxide having a perovskite structure containing at least bismuth, barium, iron, and titanium;
- forming a second electrode on the piezoelectric layer;
- and
- firing at a temperature greater than 650° C.
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Dependencies are inferred from the claim text.