Electrode for generating plasma and plasma generator
AssigneeVeeco ALD Inc.
InventorSang In Lee
Life of this patent
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Abstract
A plasma generator may include a first electrode extending in one direction, and a second electrode spaced apart from the first electrode. Facing surfaces of the first electrode and the second electrode may have spiral shapes along the one direction. A cross-section of the first electrode and a cross-section of the second electrode, which are perpendicular to the one direction, may have at least partially concentric shapes. An electrode for generating plasma may include a platform extending in one direction, and at least one protruding thread spirally formed on a surface of the platform along the one direction.
Claims6
A plasma generator, comprising:
- a first electrode comprising:
- a cylindrical platform having a curved outer surface and extending in a longitudinal direction, the platform formed with a channel extending along a length of the platform to carry a cooling medium, and
- a plurality of spiral protrusions around the curved outer surface of the platform with an equal interval between the plurality of protruding spiral protrusions;
- and
- a second electrode spaced apart from the first electrode in a direction perpendicular to the longitudinal direction and partially surrounding the curved outer surface of the first electrode, the second electrode having an inner surface and an outer surface, the inner surface facing the first electrode and concentric with the curved outer surface of the platform, the outer surface facing away from the first electrode and concentric with the curved outer surface, plasma generated between the plurality of spiral protrusions and the second electrode at locations away from a substrate.
Dependencies are inferred from the claim text.