Substrate coating device with control section that synchronizes substrate moving velocity and delivery pump

A substrate coating device for forming a coating film of a fixed length on a surface of a plate-shaped substrate by scanning a slit nozzle over the substrate in one direction relative to the substrate while delivering a coating liquid from the slit nozzle, the substrate coating device comprising:

• a slider for supporting the substrate and configured to be driven by a slider shaft actuated according to a generated command trajectory for driving the slider including an accelerating interval (Ta′), a constant moving velocity interval (Tc), and a decelerating interval (Td′) of the slider and scan the slit nozzle relative to the substrate;
• a pump configured to be driven by a pump shaft actuated according to a command trajectory of coating operating conditions including an accelerating interval (Ta), a constant delivery interval (Tp), and a decelerating interval (Td) of said pump shaft and the pump supplies the coating liquid to the slit nozzle;
• a delivery state quantity measuring section configured to measure a state quantity indicative of a delivery state of the coating liquid from a tip of the slit nozzle;
• and
• a control section configured to control the slider and the pump by generating the command trajectories of the slider shaft and the pump shaft, wherein the generated command trajectory of the slider shaft based on measurement information received from the delivery state quantity measuring section when the pump is driven according to the command trajectory of the pump shaft.