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US 8,770,034 B2Granted
Packaged sensor with multiple sensors elements
AssigneeHoneywell International Inc.
InventorsIan Bentley, Lamar Floyd Ricks
Life of this patent
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Abstract
The present disclose relates to sensor including multiple sensor elements. In some cases, the multiple sensor elements may be mounted on a single substrate and each may be configured to sense a single parameter with different resolutions, sensitivities, and/or ranges, and/or the multiple parameters. In one example, multiple pressure sensing die may be mounted in a single package, and each may be configured as a differential pressure sensor, an absolute pressure sensor, and/or a gauge pressure sensor, as desired.
Claims20
A pressure sensor comprising:
- a substrate including a first side and a second side;
- a first pressure sensing die mounted on the first side of the substrate, wherein the first pressure sensing die includes a diaphragm and one or more piezoresistive elements positioned on the diaphragm, wherein the first pressure sensing die is positioned over a first opening in the substrate, the first opening extending between the first side and the second side of the substrate;
- a second pressure sensing die mounted on the first side of the substrate, wherein the second pressure sensing die includes a diaphragm and one or more piezoresistive elements positioned on the diaphragm;
- a first housing member positioned on the first side of the substrate and defining a first cavity around the first pressure sensing die and the second pressure sensing die, wherein the first housing member includes a first pressure opening for exposing the first pressure sensing die and/or the second pressure sensing die to a first pressure;
- and
- a second housing member positioned on the second side of the substrate and defining a second cavity, wherein the second housing member includes a second pressure opening for exposing the first pressure sensing die and/or the second pressure sensing die to a second pressure.
3 more elements
A pressure sensor comprising:
- a substrate;
- a first pressure sensing die mounted on the substrate, wherein the first pressure sensing die includes a diaphragm and one or more piezoresistive elements positioned on the diaphragm;
- a second pressure sensing die mounted on the substrate, wherein the second pressure sensing die includes a diaphragm and one or more piezoresistive elements positioned on the diaphragm;
- a third pressure sensing die mounted on the substrate, wherein the third pressure sensing die includes a diaphragm and one or more piezoresistive elements positioned on the diaphragm;
- a housing positioned on the substrate and defining one or more cavities around the first pressure sensing die, the second pressure sensing die, and the third pressure sensing die;
- wherein the first pressure sensing die, the second pressure sensing die, and the third pressure sensing die are configured to sense different parameters and/or have different resolutions.
3 more elements
A pressure sensor comprising:
- a substrate including a first side and a second side;
- a first pressure sensing die mounted on the first side of the substrate, wherein the first pressure sensing die includes a diaphragm and one or more piezoresistive elements positioned on the diaphragm, wherein the first pressure sensing die is positioned over a first opening in the substrate, the first opening extending between the first side and the second side of the substrate;
- a second pressure sensing die mounted on the first side of the substrate, wherein the second pressure sensing die includes a diaphragm and one or more piezoresistive elements positioned on the diaphragm, wherein the second pressure sensing die is positioned over a second opening in the substrate, the second opening extending between the first side and the second side of the substrate;
- and
- a first housing member positioned on the first side of the substrate and defining a first cavity around the first pressure sensing die and the second pressure sensing die.
2 more elements
Dependencies are inferred from the claim text.