Substrate treatment system
AssigneeVon Ardenne Anlagentechnik GmbH
InventorHenrik Obst
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Abstract
A substrate treatment system for treating substrates in a continuous process includes a system chamber delimited by chamber walls, having an entry lock and an exit lock, and also at least one substrate treatment device and a transportation device inside the system chamber. The transportation device has an arrangement of transportation rollers arranged one behind the other in the transportation direction, for vertical or horizontal transportation of substrates. The rotor of the drive device is arranged under the pressure conditions prevailing in the system chamber and the stator of the drive device is arranged outside the pressure conditions prevailing in the system chamber.
Claims9
Substrate treatment system for treating substrates, comprising a system chamber delimited by chamber walls, at least one substrate treatment device, and a transportation device inside the system chamber, the transportation device having an arrangement of transportation rollers arranged one behind an other in a transportation direction, for vertical or horizontal transportation of substrates, and at least one drive device, wherein a rotor of the drive device is arranged under pressure conditions prevailing in the system chamber and has a bell-like form with an annular cross-section extending from an end of a rotor shaft, and a stator of the drive device is arranged outside the pressure conditions prevailing in the system chamber.
Substrate treatment system for treating substrates, comprising a system chamber delimited by chamber walls, at least one substrate treatment device, and a transportation device inside the system chamber, the transportation device having an arrangement of transportation rollers arranged one behind an other in a transportation direction, for vertical or horizontal transportation of substrates, and at least one drive device, wherein a rotor of the drive device is arranged under pressure conditions prevailing in the system chamber and comprises a disc at the end of a rotor shaft, and a stator of the drive device is arranged outside the pressure conditions prevailing in the system chamber.
Dependencies are inferred from the claim text.