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AssigneeTokyo Electron Limited
InventorsTsuyoshi Moriya, Yasutoshi Umehara, Yuki Kataoka, Michiko Nakaya
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Disclosed is an abnormality detection system that accurately detects abnormalities that arise in a device. The abnormality detection system 100, which detects abnormalities that arise in a plasma processing device 2, is provided with: a plurality of ultrasonic sensors 41, which detects acoustic emissions (AE), which cause abnormalities to arise; a distributor 65, which distributes each output signal from the ultrasonic sensors 41 into a first signal and a second signal; a trigger 52, which samples the first signal at, for example, 10 kHz, and generates a trigger signal when predetermined characteristics are detected; a trigger generation time counter 54, which receives trigger signals and determines the time of trigger generation; a data logger board 55, which creates sampling data from sampling the second signal at, for example, 1 MHz; and a PC 50, which analyzes abnormalities arising in the plasma processing device 2 by means of performing a waveform analysis of data from the sampling data, said data corresponding to a set time period using the time of trigger generation determined by the trigger generation time counter 54 as a benchmark.
An abnormality detection system of detecting abnormality occurring in a processing apparatus in which acoustic emission (AE) as noise may be mixed into AE generated from an abnormality detection target, characterized by comprising:
An abnormality detection method for detecting abnormality occurring in a processing apparatus in which acoustic emission (AE) as noise may be mixed into AE generated from an abnormality detection target, characterized by comprising steps of:
A non-transitory computer-readable recording medium of storing a program for executing an abnormality detection method for detecting the abnormality occurring in a processing apparatus, in which acoustic emission as noise may be mixed into AE generated from an abnormality detection target, predetermined as an abnormality detection system controlled by a computer, wherein the abnormality detection method comprises steps of:
Dependencies are inferred from the claim text.