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US 8,740,355 B2Granted
Liquid ejecting head, liquid ejecting apparatus, piezoelectric element, and piezoelectric ceramic
AssigneeSeiko Epson Corporation
InventorsMasahisa Nawano, Tomokazu Kobayashi
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Abstract
A liquid ejecting head includes a pressure generating chamber communicating with a nozzle aperture, and a piezoelectric element including a piezoelectric layer and electrodes that apply a voltage to the piezoelectric layer. The piezoelectric layer is made of a complex oxide having a perovskite structure. The piezoelectric layer contains bismuth, barium, iron and titanium. The piezoelectric layer has an intensity ratio of a (111) orientation intensity to a (100) orientation intensity of 3 or more.
Claims12
A piezoelectric element comprising:
- a piezoelectric layer made of a complex oxide having a perovskite structure, the piezoelectric layer containing bismuth, barium, iron and titanium and having an intensity ratio of a (111) orientation intensity to a (100) orientation intensity of 3 or more, wherein the piezoelectric layer is preferentially orientated in the (111) plane at a rate of 90% or more, and
- electrodes that apply a voltage to the piezoelectric layer.
Dependencies are inferred from the claim text.