Manufacturing method for microvalves

A method for manufacturing of microvalves, each microvalve being composed in a stacked design of a plurality of components comprising at least two housing parts, a membrane clamped between the two housing parts, and an actuator,

• a plurality of identical components being respectively arranged on a common, individual support plate and positioned next to each other in one plane,
• the manufacturing method comprising the steps of:
• a) providing support plates with respectively identical components positioned in a grid pattern with each having the same grid dimension,
• b) inserting the support plates on top of one another in a retaining device,
• c) connecting at least some of the stacked components arranged on the support plates on an outer edge delimiting the components by a joining method forming the microvalves,
• d) separating the microvalves by punching, and
• e) punching the membrane from a membrane support plate during connection of the components.