Pressure sensor structure and associated method of making a pressure sensor

A sensor system, comprising:

• a sensor structure comprising:
• a diaphragm plate of an electrically conductive material, the diaphragm plate including substantially planar opposed first and second surfaces;
• and
• a backing plate comprising an electrically conductive material;
• a dielectric layer between the first surface of the diaphragm plate and the backing plate, the dielectric layer configured to support and separate a flexion region of the diaphragm plate from an adjacent surface of the backing plate to enable deflection of the flexion region relative to the adjacent surface of the backing plate, a capacitance of the sensor structure varying as a function of an amount of the deflection of the flexion region;
• and
• a sensing device coupled to the backing plate and a housing in which sensor structure is mounted, the sensing device configured to provide an output signal that represents pressure within the housing based on the capacitance of the sensor structure.