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US 8,739,628 B2Granted
Inertial sensor
AssigneeSamsung Electro-Mechanics Co., Ltd.
InventorsJong Woon Kim, Liwei Lin, Minyao Mao, Heung Woo Park
Life of this patent
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Abstract
An inertial sensor includes a plate-like substrate layer, a mass body, a support frame, a limit stop extending in the central direction of the mass body from the support frame, and a detection unit detecting the displacement of the displacement part. The inertial sensor adopts the limit stop limiting the downward displacement of the mass body to prevent the support portion of the mass body from being damaged.
Claims20
An inertial sensor, comprising:
- a plate-like substrate layer including a displacement part provided at a central part thereof, a fixing part provided at the outside of the displacement part, and an elastic part connecting the displacement part to the fixing part so that the displacement part is displaceable with respect to the fixing part;
- a mass body provided at the bottom portion of the displacement part;
- a support frame provided at the bottom portion of the fixing part to support the substrate layer and surrounding the mass body;
- a limit stop extending in the central direction of the mass body from the support frame to correspond to the elastic part and disposed to be spaced by a predetermined gap from the bottom surface of the elastic part, and a detection unit detecting the displacement of the displacement part.
1 more element
An inertial sensor, comprising:
- a plate-like substrate layer;
- a mass body provided at the bottom portion of the central part of the substrate layer;
- a support frame provided on the bottom portion of the edge of the substrate layer to support the substrate layer and surrounding the mass body;
- a limit stop extending in the central direction of the mass body from the support frame and disposed to be spaced by a predetermined gap from the bottom surface of the substrate layer;
- and
- a detection unit detecting the displacement of the central part of the substrate layer.
3 more elements
Dependencies are inferred from the claim text.