Moisture sensors on conductive substrates
AssigneeUniversity of Kentucky Research Foundation
InventorsZhi David Chen, Ibrahim Yucedag
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Abstract
A moisture sensor includes a first electrode (a conductive substrate) having a first sensor portion and a first terminal portion as well as a second electrode having a second sensor portion and a second terminal portion. The moisture sensor also includes a layer of porous dielectric material sandwiched between the first sensor portion and the second sensor portion. Further the moisture sensor includes a layer of dense insulating material sandwiched between the first terminal portion and the second terminal portion. Leads are then connected to the two terminal portions.
Claims17
A moisture sensor, comprising;
- a first electrode, having a first sensor portion and a first terminal portion;
- a layer of porous dielectric material deposited on said first sensor portion;
- a layer of dense insulating material deposited on said first terminal portion;
- and
- a second electrode having a second sensor portion and a second terminal portion wherein the second sensor portion is deposited on the porous dielectric material, and the second terminal portion is deposited on the layer of dense insulating material.
A method of manufacturing a moisture sensor comprising:
- depositing a layer of insulating material on a first terminal portion of a first electrode;
- providing a layer of dielectric material on a first sensor portion of said first electrode;
- depositing a second electrode over said layer of insulating material and said layer of dielectric material so as to produce a sensor assembly wherein said second electrode has a second sensor portion overlying said layer of dielectric material and a second terminal portion overlying said layer of insulating material.
Dependencies are inferred from the claim text.