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US 8,739,622 B2Granted
Capacitive humidity detector with nanoporous hydrophilic dielectric
AssigneeCommissariat A L'energie Atomique Et Aux Energies Alternatives
InventorsHubert Grange, Jean-Sébastien Danel, Brigitte Desloges, Vincent Jousseaume
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Abstract
A humidity sensor of capacitive type, a device for detecting or measuring humidity including the sensor, and a method to fabricate the sensor. The humidity sensor includes at least one nanoporous dielectric material positioned between at least one first electrode of a capacitor and at least one second electrode of the capacitor.
Claims13
A humidity sensor of capacitive type, comprising:
- at least one first electrode and at least one second electrode;
- and
- at least one nanoporous dielectric material between the first electrode and the second electrode, the nanoporous dielectric material comprising pores with radius of less than 2 nanometers, the nanoporous dielectric material further comprising hydrophilic sites, the nanoporous dielectric material being MSQ or SiOCH.
A method to fabricate a humidity sensor of capacitive type, comprising:
- forming on a substrate at least one first electrode and at least one second electrode;
- forming at least one nanoporous dielectric material at least between the first electrode and the second electrode, the nanoporous dielectric material comprising pores with a radius of less than 2 nanometers, the nanoporous dielectric material being MSQ or SiOCH;
- and
- hydrophilic treatment of the dielectric material.
1 more element
Dependencies are inferred from the claim text.