Bipolar electrostatic chuck

A bipolar electrostatic chuck, at least comprising:

• an electrode layer including a first electrode and a second electrode;
• and
• an upper insulating layer which forms a substrate attracting surface for attracting a substrate,
• wherein in a case where a surface of the electrode layer is regarded to be divided into a plurality of virtual cells having a predetermined width (L) arranged in an x direction and a y direction, first electrode sections forming the first electrode and second electrode sections forming the second electrode are alternately arranged in the plurality of virtual cells in the x direction, and are alternately arranged in the plurality of virtual cells in the y direction, with a space (d) between the first electrode section and the second electrode section which are adjacent to each other,
• wherein the first electrode sections and the second electrode sections are disposed, so that a plurality of electrodeless portions having no electrode section are formed in the virtual cells,
• wherein, the substrate attracting surface of the upper insulating layer has protrusions protruding to the substrate side at a position corresponding to the electrodeless portion, so that top surfaces of the protrusions contact with the substrate to form the substrate attracting surface, and
• wherein the upper insulating layer comprises a film selected from the group consisting of a polyimide film, a silicone film, and a polyamide film.