Showerhead support structure for improved gas flow
AssigneeApplied Materials, Inc.
InventorsRobin L. Tiner, Soo Young Choi, Qunhua Wang, Jrjyan Jerry Chen
Life of this patent
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Abstract
Embodiments of the present invention generally provide apparatus and methods for supporting a gas distribution showerhead in a processing chamber. In one embodiment, a gas distribution showerhead for a vacuum chamber is provided. The gas distribution showerhead comprises a body having a first side and a second side opposite the first side, and a plurality of gas passages formed through the body, the gas passages comprising a first bore formed in the first side that is fluidly coupled to a second bore formed in the second side by a restricting orifice, and a suspension feature formed in the first bore of at least one of the gas passages.
Claims15
A gas distribution showerhead for a vacuum chamber, the gas distribution showerhead comprising:
- a body having a first side and a second side opposite the first side, and a plurality of gas passages formed through the body in a longitudinal direction, each of the plurality of gas passages comprising a first bore formed in the first side that is fluidly coupled to a second bore formed in the second side by a restricting orifice;
- one or more alternative gas passages formed through the body in an inclined angle relative to the longitudinal direction of the plurality of gas passages and intersecting with at least one of the first bores of the plurality of gas passages;
- and
- a suspension feature disposed in one of the plurality of gas passages facilitating an obstructed gas passage, wherein the one or more alternative gas passages provides a flow path from the first side of the body to at least the obstructed gas passage.
A gas distribution showerhead for a vacuum chamber, the gas distribution showerhead comprising:
- a body having a first side and a second side opposite the first side, the body having a plurality of gas passages formed between the first side and the second side, each of the plurality of gas passages having a first bore formed in the first side that is fluidly coupled to a second bore formed in the second side by a restricting orifice;
- a suspension fitting disposed in the first bore of at least one of the plurality of gas passages forming an obstructed gas passage;
- and an alternative gas passage in fluid communication with a volume between a backing plate and the first side of the gas distribution showerhead providing gas flow to the obstructed gas passage, wherein the alternative gas passage comprises a laterally oriented bore formed in the body of the gas distribution showerhead at an angle relative to a horizontal plane defined by a surface of the gas distribution showerhead.
Dependencies are inferred from the claim text.