Electrical components and method of manufacture
OwnerL. Pierre de Rochemontinventor
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Abstract
An electrical component provides a ceramic element located on or in a dielectric substrate between and in contact with a pair of electrical conductors, wherein the ceramic element includes one or more metal oxides having fluctuations in metal-oxide compositional uniformity less than or equal to 1.5 mol % throughout the ceramic element. A method of fabricating an electrical component, provides or forming a ceramic element between and in contact with a pair of electrical conductors on a substrate including depositing a mixture of metalorganic precursors and causing simultaneous decomposition of the metal oxide precursors to form the ceramic element including one or more metal oxides.
Claims63
An electrical component, comprising a ceramic element located on or in a dielectric substrate between and in contact with a pair of electrical conductors, wherein said ceramic element includes three or more metal oxides having fluctuations in metal-oxide compositional uniformity less than or equal to 1.5 mol % throughout said ceramic element, wherein said ceramic element has a substantially uniform grain sizes measured along a major axis and further wherein the grain sizes are less than 1.5 times and greater than 0.5 times an average grain size contained in the ceramic element.
Dependencies are inferred from the claim text.