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US 8,711,518 B1Granted
System and method for deposition in high aspect ratio magnetic writer heads
AssigneeWestern Digital (Fremont), LLC
InventorsWanxue Zeng, Weimin Si, Ying Hong
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Abstract
Systems and methods for fabricating a microelectric device are provided herein. Various embodiments provide for systems and methods for fabricating a magnetic recording pole using plasma-enhanced chemical vapor deposition (PECVD) when depositing seed material. For some embodiments, fabrication of the magnetic recording pole may comprise using plasma-enhanced chemical vapor deposition (PECVD) Ru as an adhesion layer for a plating seed layer.
Claims19
A method for fabricating a magnetic recording pole, comprising:
- forming an etch-protection layer;
- forming an adhesion layer over the etch-protection layer, wherein the adhesion layer comprises plasma-enhanced chemical vapor deposition (PECVD) Ru;
- forming a plating seed layer over the adhesion layer;
- and
- forming a plating layer over the plating seed layer, wherein the plating layer comprises magnetic material and is configured to operate as the magnetic recording pole.
2 more elements
A magnetic recording pole, comprising:
- an etch-protection layer;
- an adhesion layer disposed over the etch-protection layer, wherein the adhesion layer comprises plasma-enhanced chemical vapor deposition (PECVD) Ru;
- a plating seed layer disposed over the adhesion layer;
- and
- a plating layer disposed over the plating seed layer, wherein the plating layer comprises magnetic material and is configured to operate as the magnetic recording pole.
2 more elements
A disk drive, comprising:
- a media;
- a slider;
- and
- a magnetic recorder pole coupled to the slider, the magnetic recorder pole comprising:
- an etch-protection layer, an adhesion layer disposed over the etch-protection layer, wherein the adhesion layer comprises plasma-enhanced chemical vapor deposition (PECVD) Ru, a plating seed layer disposed over the adhesion layer, and a plating layer disposed over the plating seed layer, wherein the plating layer comprises magnetic material and is configured to operate as the magnetic recording pole.
2 more elements
Dependencies are inferred from the claim text.