Automatic misalignment balancing scheme for multi-patterning technology

A method of routing, comprising:

• generating a routing grid for double patterning layers comprising a plurality of vertical grid lines extending along a first direction and a plurality of horizontal grid lines extending along a second, orthogonal direction;
• assigning different colors to adjacent vertical grid lines;
• assigning different colors to adjacent horizontal grid lines;
• and
• routing shapes on the double patterning layers along a routing path that alternates between the vertical grid lines having different colors and that alternates between the horizontal grid lines having different colors.

A computer system, comprising:

• a memory element configured to store an integrated chip layout;
• a routing element coupled to the memory element and configured to perform the steps of:
• generating a routing grid for one or more multi patterning layers, comprising a first type and a second type of vertical grid lines extending along a first direction and a first type and a second type of horizontal grid lines extending along a second, orthogonal direction;
• routing shapes on the one or more multi patterning layers along a routing path having a stair-step pattern that alternates between the first or second type of vertical grid lines and the first or second type of horizontal grid lines;
• and
• assigning colors to the shapes in a manner that causes the shapes routed on the first type of vertical grid lines and shapes routed on the second type of vertical grid lines to be written to different photomasks.