Method for removing metallic nanotube
AssigneeInstitute of Microelectronics, Chinese Academy of Sciences
InventorsHuilong Zhu, Zhijiong Luo, Haizhou Yin
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Abstract
A method for removing a metallic nanotube, which is formed on a substrate in a first direction, includes forming a plurality of conductors in a second direction crossing the first direction, electrically contacting the plurality of conductors with metallic nanotube, respectively, forming at least two voltage-applying electrodes on the conductors, each of which electrically contacting at least one of the conductors, and applying voltages to at least some of the conductors through the voltage-applying electrodes, respectively. Among the conductors to which the voltages are respectively applied, every two adjacent conductors have an electrical potential difference created therebetween, so as to burn out the metallic nanotube.
Claims10
A method for removing a metallic nanotube which is formed on a substrate in a first direction, the method comprising:
- forming a plurality of conductors in a second direction crossing the first direction, the conductors electrically contacting the metallic nanotube, respectively;
- forming an insulating layer to cover the conductors;
- patterning the insulating layer to expose a first conductor or a first group of conductors out of the plurality of the conductors in a first region and to expose a second conductor or a second group of conductors, different from the first conductor or the first group of conductors, out of the conductors in a second region different from the first region;
- forming a first voltage-applying electrode on the insulating layer in the first region and a second voltage-applying electrode on the insulating layer in the second region, so that the first voltage-applying electrode electrically contracts the first conductor or the first group of conductors via the patterned insulating layer, and the second voltage-applying electrode electrical contacts the second conductor or the second group of conductors via the patterned insulating layer;
- applying different voltages to the first and second voltage-applying electrodes, respectively, to burn out the metallic nanotube;
- and
- removing the voltage-applying electrodes, the insulating layer and the conductors.
Dependencies are inferred from the claim text.