Carrier system and method for handling carried object using the same

A carrier system comprising:

• a processing equipment unit configured to perform a predetermined process to a carried object;
• a carrier configured to carry a carried object accommodated in a case;
• and
• an opener equipped to the processing equipment unit and configured to be mounted with the case from the carrier, wherein
• the opener includes an opener control panel configured to exchange a signal with the carrier to control elevation of the case,
• the carrier is further configured to exchange a signal with the opener control panel to mount the case on the opener,
• the carrier is equipped with a carrier-optical communication unit and is movable on a rail equipped at a position including directly above the opener,
• the rail is equipped with a rail-optical communication unit configured to exchange a signal with the carrier-optical communication unit and to exchange a signal with the opener control panel,
• the carrier is configured to exchange a signal with the opener control panel via the rail-optical communication unit equipped to the rail to mount the case on the opener, and
• the opener control panel is integrated with the opener;
• wherein the processing equipment unit includes a processing control unit which is different from the opener control panel of the opener;
• wherein the opener is detachable relative to the processing equipment unit;
• wherein the processing equipment unit comprises a processing unit for processing wafers;
• wherein instructions for performing the control elevation of the case are stored in the opener control panel and instructions for performing the predetermined process to the carried object are separately stored in the processing control unit;
• wherein communication between the processing equipment unit and the opener comprises:
• sending a signal from the opener control panel to the processing control unit indicating acceptance of the case, and sending an open signal from the processing control unit to the opener control panel to open the case;
• wherein the processing equipment unit is configured to perform the predetermined process after the case is opened;
• and
• wherein when the processing equipment unit is detached and a subsequent processing equipment is attached, the carrier and the opener are configured to continue performing the control elevation.