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AssigneeFujitsu Limited
InventorsTakeaki Shimanouchi, Masahiko Imai, Takashi Katsuki, Osamu Toyoda, Satoshi Ueda
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A driving method for driving an electrostatic actuator including a fixed electrode and a movable electrode opposing each other with a dielectric layer interposed therebetween, includes applying a first voltage, between the fixed electrode and the movable electrode, to bring the movable electrode into contact with the dielectric layer, and applying a second voltage, between the fixed electrode and the movable electrode, after application of the first voltage is stopped and before the movable electrode moves away from the dielectric layer. Here, the second voltage has a polarity opposite to a polarity of the first voltage and an absolute value smaller than an absolute value of the first voltage.
A driving method for driving an electrostatic actuator including a fixed electrode and a movable electrode opposing each other with a dielectric layer interposed therebetween, the method comprising:
An electrostatic actuator, comprising:
Dependencies are inferred from the claim text.