Method of forming semiconductor device having seal ring structure
AssigneeRenesas Electronics Corporation
InventorTatsuya Usami
Life of this patent
Estimating the term…
Abstract
A method of producing a semiconductor device includes forming, on a first insulating film formed on a substrate, a first groove in an element-forming region to form one of a via and a wiring therein, and a first seal ring groove in a seal ring part, forming one of a via and a wiring in the first groove and a first metal layer in the first seal ring groove, and then removing the metal material in a part exposed to an outside of the first groove and the first seal ring groove, forming a second insulating film on the first insulating film, forming, on the second insulating film, a second groove, and a second seal ring groove in the seal ring part on the first seal ring groove, and forming one of a via and a wiring in the second groove and a second metal layer.
Claims9
A method of producing a semiconductor device, said method comprising:
- forming, on a first insulating film formed on a substrate, a first groove in an element-forming region to form one of a via and a wiring therein, and a first seal ring groove in a seal ring part to surround the element-forming region;
- forming one of a via and a wiring in the first groove and a first metal layer in the first seal ring groove by filling the first groove and the first seal ring groove with a metal material, and then removing the metal material in a part thereof exposed to an outside of the first groove and the first seal ring groove;
- forming a second insulating film on the first insulating film;
- forming, on the second insulating film, a second groove in the element-forming region to form one of a via and a wiring to therein, and a second seal ring groove in the seal ring part on the first seal ring groove;
- and
- forming one of a via and a wiring in the second groove and a second metal layer, which is in contact with the first metal layer, in the second seal ring groove, by filling the second groove and the second seal ring groove with a metal material, and then removing the metal material in a part thereof exposed to an outside of the second groove and the second seal ring groove,
- wherein, in forming the first seal ring groove, the first seal ring groove is formed by leaving the first insulating film therein,
- wherein, in forming the first metal layer in the first seal ring groove, a through hole is formed in the first metal layer by the first insulating film formed to be left in the first seal ring groove,
- wherein, in forming the second seal ring groove, after the first insulating film is exposed on a bottom surface of the second seal ring groove, an upper part of the exposed first insulating film is removed, leaving the first insulating film in a lower part of the through hole in the first metal layer, and
- wherein, in forming the second metal layer, the second metal layer projects into an upper part of the through hole in the first metal layer.
A method of forming a seal ring structure, said method comprising:
- forming a first metal layer on a semiconductor substrate, said first metal layer comprising a through hole;
- placing an insulating material in said through hole;
- forming an insulating layer formed on said first metal layer and said insulating material;
- forming a through hole in said insulating layer to expose a top surface of said insulating material and a top surface of a portion of said first metal layer, said portion of said first metal layer being adjacent to said through hole of said first metal layer;
- removing a top portion of said insulating material to leave a bottom portion of said insulating material in said through hole of said first metal layer;
- and
- placing a second metal layer on said top portion of said insulating material in said through hole of said first metal layer and in said through hole of said insulating layer, thereby said second meal layer comprising a projected portion being inserted into said through hole of said first metal layer.
Dependencies are inferred from the claim text.