US 8,617,314 B2Granted

Organic deposition apparatus and method of depositing organic substance using the same

AssigneeADP Engineering Co., Ltd.

InventorsYoung Ung An, Ki Taek Jung, Jong Yeoul Ji, Sang Leoul Kim

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Abstract

An organic material deposition system and method are provided. The organic material deposition apparatus may include a chamber having a processing space formed therein, a source supply device that generates an organic source and injects and diffuses the organic source into the processing space through a shower head provided in the processing space. The substrate is supported by a stage device that moves the substrate upward and downward within the processing space to adjust a distance between the substrate and the shower head. A pumping port provided at an upper positioned at an upper portion of the processing space provides a vacuum exhaust path that directs flow through the processing space toward the stage device. This allows an organic thin film with a uniform thickness to be deposited using an apparatus with a relatively simple configuration.

Claims14

Dependent claims

An organic deposition apparatus, comprising:

a chamber having a processing space formed therein, the processing space including a first end wall and a second end wall opposite the first end wall;
a source supply device that generates an organic source and supplies the organic source into the processing space, the source supply device comprising:
a source generator provided outside the processing space, proximate the second end wall thereof, wherein the source generator vaporizes an organic substance to generate the organic source;
a dispersion device provided in the processing space, proximate the second end wall thereof;
and
a mixer that extends through the second end wall of the processing space to connect the source generator and the dispersion device such that the dispersion device is separated from the second end wall of the processing space by a corresponding portion of the mixer, wherein a cross sectional area of the dispersion device is greater than a cross sectional area of the mixer;
a stage device provided proximate the first end wall of the processing space, opposite the dispersion device, wherein the stage device supports a substrate in the processing space and moves the substrate so as to adjust a distance between the substrate and the dispersion device;
a first port provided through the first end wall of the processing space above the stage device, wherein the first port provides an exhaust path through the processing space that directs flow of the organic source from the dispersion device toward the stage device and out of the processing space;
and
a second port provided through the second end wall of the processing space below the dispersion device.

7 more elements

An organic deposition apparatus, comprising:

a chamber having a processing space formed therein;
a stage device provided at a first end of the processing space, wherein the stage movably supports a substrate in the processing space;
a dispersion device provided at a second end of the processing opposite the first end thereof;
a source generator provided proximate the second end of the processing space, wherein the source generator vaporizes an organic substance to generate the organic source;
a mixer that connects the source generator and the dispersion device such that the dispersion device is separated from a corresponding end wall of the processing space by a corresponding portion of the mixer, a cross sectional area of the dispersion device being greater than that of the mixer, wherein the dispersion device receives an organic source from the source supply device via the mixer and disperses the organic source into the processing space toward the stage device;
a first port provided at a first end of the chamber, above the stage device;
and
a second port provided at a second end of the chamber, below the dispersion device, wherein the first port remains open and the second port is closed as the organic source is supplied into the processing space.

5 more elements

Dependencies are inferred from the claim text.