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US 8,616,820 B2Granted
Double dual slot load lock chamber
AssigneeApplied Materials, Inc.
InventorsShinichi Kurita, Wendell T. Blonigan
Life of this patent
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Abstract
Provided herein is a double dual slot load lock chamber. The double dual slot load lock chamber includes two isolated load lock regions that are vertically stacked and share a common wall, wherein each isolated load lock region comprises two substrate slots.
Claims17
A load lock chamber comprising:
- a body having two isolated load lock regions that are vertically stacked and separated by a shared common wall that is fixed within the body, wherein each isolated load lock region comprises two substrate slots;
- and
- two substrate temperature regulating devices disposed in the two isolated load lock regions for vertical movement within each of the two isolated load lock regions.
A load lock chamber, comprising:
- a body;
- an upper isolated load lock region formed within the body;
- a lower isolated load lock region formed within the body that shares a common wall with the upper isolated load lock region, wherein the common wall is fixed within the body and is horizontally disposed between the upper and lower regions, wherein each of the regions has openings disposed at opposite ends of the region, and wherein each of the regions comprise at least two substrate slots;
- and
- a first substrate temperature regulating device disposed in the upper isolated load lock region for vertical movement;
- and
- a second substrate temperature regulating device disposed in the lower isolated load lock region for vertical movement.
4 more elements
Dependencies are inferred from the claim text.