Aromatic hydrocarbon resin and composition for forming underlayer film for lithography
AssigneeMitsubishi Gas Chemical Company, Inc.
InventorsRyuji Ideno, Seiji Kita, Masashi Ogiwara, Gou Higashihara
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AssigneeMitsubishi Gas Chemical Company, Inc.
InventorsRyuji Ideno, Seiji Kita, Masashi Ogiwara, Gou Higashihara
Estimating the term…
The aromatic hydrocarbon resin can be used as a coating material and a resist resin for a semiconductor, and has a high carbon concentration and a low oxygen concentration. A composition for forming an underlayer film for lithography that has excellent etching resistance as an underlayer film for a multilayer resist process, an underlayer film formed with the same, and a pattern forming method using the same are disclosed. An aromatic hydrocarbon is reacted with an aromatic aldehyde in the presence of an acidic catalyst, thereby providing an aromatic hydrocarbon resin that has a high carbon concentration of from 90 to 99.9% by mass and a low oxygen concentration of from 0 to 5% by mass. A composition for forming an underlayer film for lithography contains the resin and an organic solvent, an underlayer film is formed with the same, and a pattern forming method uses the same.
A composition for forming an underlayer film for lithography comprising an aromatic hydrocarbon resin obtained by reacting an aromatic hydrocarbon represented by the formula (1) and an aldehyde represented by the formula (2) in the presence of an acidic catalyst:
Dependencies are inferred from the claim text.