Semiconductor element mounting member, method of producing the same, and semiconductor device
AssigneeA.L.M.T. Corp.
InventorsKouichi Takashima, Yoshifumi Aoi, Eiji Kamijo
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AssigneeA.L.M.T. Corp.
InventorsKouichi Takashima, Yoshifumi Aoi, Eiji Kamijo
Estimating the term…
A semiconductor element mounting member is arranged to infiltrate a matrix metal into a porous body that is formed by sintering diamond particles being in direct contact with each other and that has an infiltration auxiliary layer selectively formed only on the exposed surface of each diamond particle. A production method includes a step at which a mixture of diamond particles, a powder of a chemical element out of which the infiltration auxiliary layer is made, and an ammonium chloride powder is compressed and molded, is then heated to 900° C. or more, and is formed into the porous body. A semiconductor device has a semiconductor element mounted on an element mounting surface of the semiconductor element mounting member with a connecting layer therebetween.
A semiconductor element mounting member having an element mounting surface on which a semiconductor element is to be mounted, consisting of a diamond-metal complex in which at least one kind of matrix metal selected from the group consisting of Cu, Ag, and Al is infiltrated into a porous body consisting of many diamond particles characterized in that
Dependencies are inferred from the claim text.