Vacuum processing apparatus

A vacuum processing apparatus comprising:

• a plurality of carriers to be mounted with a base member;
• a circulation path which is kept in a CDA (Clean Dry Air) atmosphere and through which the carriers circulate;
• a first and a second transport chambers which are disposed in the circulation path and which transport the carriers;
• a plurality of base member loading and unloading chambers which are connected to the circulation path and which load and unload the base member to and from the carriers, the plurality of base member loading and unloading chambers including a first and a second base member loading and unloading chambers;
• and
• a plurality of vacuum processing chambers for attaching an film forming material to the substrate mounted on the carriers through a window portion of the circulation path, the plurality of vacuum processing chambers being disposed between the plurality of base member loading and unloading chambers in the circulation path respectively, the plurality of vacuum processing chambers including a first vacuum processing chamber, a second vacuum processing chamber, and a deposition chamber below the circulation path, wherein:
• the first base member loading and unloading chamber which loads and unloads the base member is connected to the first transport chamber and to the circulation path at an outer side thereof;
• and
• the second base member loading and unloading chamber which loads and unloads the base member is connected to the second transport chamber and to the circulation path at the outer side thereof;
• partial pressures of a moisture and a carbon acid gas are suppressed in the CDA (Clean Dry Air) atmosphere;
• the first transport chamber is disposed on a downstream side of the first vacuum processing chamber and on an upstream side of the second vacuum processing chamber;
• and
• the second transport chamber is disposed on a downstream side of the second vacuum processing chamber and on an upstream side of the first vacuum processing chamber.