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AssigneeTokyo Electron Limited
InventorsYasuharu Sasaki, Takehiro Ueda, Taketoshi Okajo, Kaoru Oohashi
Estimating the term…
An apparatus evaluates a substrate mounting device adapted to hold a target substrate placed on a mounting surface and to control a temperature of the target substrate. The apparatus includes an evacuatable airtightly sealed chamber accommodating therein the substrate mounting device, a heat source, arranged in a facing relationship with the mounting surface, for irradiating infrared light. The apparatus further includes an evaluation-purpose substrate adapted to be mounted on the mounting surface in place of the target substrate, the evaluation-purpose substrate being made of an infrared light absorbing material, and having a unit for measuring temperatures at plural sites on a surface and/or inside of the substrate.
An apparatus dedicated to evaluate a substrate mounting device, wherein the substrate mounting device includes a mounting surface adapted to hold a substrate placed on the mounting surface, and wherein the substrate mounting device controls a temperature of the substrate mounted on the mounting surface, comprising:
A method for evaluating a substrate mounting device, comprising:
Dependencies are inferred from the claim text.