US 8,572,533 B2 · Waiving density violations

Abstract

Waiver regions may be identified by waiver identification items. The waiver identification items may be determined based on conducting a density check process. Additionally or alternatively, reference patterns for pattern matching, cell names or markers may serve as the waiver identification items. Waiver geometric items may be created for the waiver regions and added to the layout design. Based on an overlap of a density check window with the waiver geometric items and waiving threshold information, a density violation in that density check window is determined to be reported as a density violation or a waived density violation with some implementations of the invention. With some other implementations of the invention, pattern density of a density check window may not be checked if an overlap of the density check window with the waiver geometric items is above a waiving threshold value.

Claims19

Dependent claims

A method of waiving density violations, comprising using a computing device to perform:

receiving layout design data for a layout design and density violation waiver information, the density violation waiver information comprising waiver data that associate waiver region identification items with waiver geometric elements and with waiving threshold information;
determining overlap information for each of density check windows overlapping with the waiver geometric elements, the overlap information indicating a degree to which one or more of the waiver geometric elements occupy a respective one of the density check windows;
and
performing a density and waiver check process on the layout design based on the overlap information and the waiver threshold information.

1 more element

A non-transitory processor-readable medium storing processor-executable instructions for causing one or more processors to perform a method of waiving density violations, the method comprising:

receiving layout design data for a layout design and density violation waiver information, the density violation waiver information comprising waiver data that associate waiver region identification items with waiver geometric elements and with waiving threshold information;
determining overlap information for each of density check windows overlapping with the waiver geometric elements, the overlap information indicating a degree to which one or more of the waiver geometric elements occupy a respective one of the density check windows;
and
performing a density and waiver check process on the layout design based on the overlap information and the waiver threshold information.

1 more element

Dependencies are inferred from the claim text.

Waiving density violations

Life of this patent

Waiving density violations

Life of this patent

Abstract

Claims19