System, method and storage medium for controlling a processing system

A control method for a processing system that includes a plurality of processing chambers in which a predetermined process is performed on an object to be processed, a storage port that stores objects to be processed, a transfer mechanism that transfers each object to be processed to a predetermined transfer destination between the plurality of processing chambers and the storage port, and pre-processing chambers that connect each of the processing chambers and the transfer mechanism, the control method comprising the steps of:

• determining a transfer destination for each object to be processed that is stored in the storage port after a preceding object is removed from the storage port;
• changing, after transfer of one of the objects to be processed that is stored in the storage port to one of the plurality of processing chambers is inhibited, in accordance with a timing at which the inhibition of the transfer to the processing chamber is released, the transfer destination of one of the objects to be processed whose transfer destination has already been determined and that is next to be transferred from the storage port among the objects to be processed, to the processing chamber that is released from the transfer inhibition;
• and
• evacuating, to the storage port, one of the objects to be processed that has been determined to be transferred to the processing chamber to which the transfer is inhibited and that has not yet been transferred to the processing chamber to which the transfer is inhibited,
• wherein
• the evacuating includes determining whether or not the object to be processed has been transferred based on whether the object to be processed has been transferred to a pre-processing chamber of the processing chamber to which the transfer is inhibited.

A storage medium storing a processing program that comprises instructions that command a computer to execute control of a processing system that includes a plurality of processing chambers in which a predetermined process is performed on an object to be processed, a storage port that stores objects to be processed, a transfer mechanism that transfers each object to be processed to a predetermined transfer destination between the plurality of processing chambers and the storage port, and pre-processing chambers that connect each of the processing chambers and the transfer mechanism, wherein

• the processing program comprising the processes of:
• determining a transfer destination for each object to be processed that is stored in the storage port after a preceding object is removed from the storage port;
• changing, after transfer of one of the objects be processed that is stored in the storage port to one of the plurality of processing chambers is inhibited, in accordance with a timing at which the inhibition of the transfer to the processing chamber is released, the transfer destination of one of the objects to be processed whose transfer destination has already been determined and that is next to be transferred from the storage port among the objects to be processed, to the processing chamber that is released from the transfer inhibition;
• and
• evacuating, to the storage port, one of the objects to be processed that has been determined to be transferred to the processing chamber to which the transfer is inhibited and that has not yet been transferred to the processing chamber to which the transfer is inhibited, wherein
• the evacuating includes determining whether or not the object to be processed has been transferred based on whether the object to be processed has been transferred to a pre-processing chamber of the processing chamber to which the transfer is inhibited.