Imprint lithography
AssigneeASML Netherlands B.V.
InventorKlaus Simon
Life of this patent
Estimating the term…
Abstract
An imprinting method is disclosed that, in embodiment, includes contacting first and second spaced target regions of an imprintable medium on a substrate with first and second templates respectively to form respective first and second imprints in the medium and separating the first and second templates from the imprinted medium.
Claims21
An imprinting method, comprising:
- contacting each target region of a first set of target regions of imprintable medium on a substrate with a first imprint template to form a first set of respective imprints at the first set of target regions;
- contacting each target region of a second set of target regions of imprintable medium with a second imprint template to form a second set of respective imprints at the second set of target regions, the second set of target regions spaced from the first set of target regions;
- and
- providing imprintable medium on the substrate during the time the first and/or second imprint template becomes from being located adjacent a first target region to being located adjacent a second target region of the respective first and/or second sets of target regions.
An imprinting apparatus, comprising:
- a substrate table configured to hold a substrate;
- a first imprint template support configured to support a first imprint template, the first imprint template support configured to cause the first imprint template to contact each target region of a first set of target regions of imprintable medium on the substrate to form a first set of imprints at the first set of target regions;
- a second imprint template support configured to support a second imprint template, the second imprint template support configured to cause the second imprint template to contact each target region of a second set of target regions of imprintable medium to form a second set of imprints at the second set of target regions, the second set of target regions spaced from the first set of target regions;
- and
- a dispenser configured to provide imprintable medium on the substrate, while the substrate is supported on the substrate table, during the time the first and/or second imprint templates becomes from being located adjacent a first target region to being located adjacent a second target region of the respective first and/or second sets of target regions.
An imprinting apparatus, comprising:
- a plurality of independently movable imprint template supports;
- and
- a plurality of imprintable medium dispensers.
An imprinting apparatus comprising a plurality of imprint template supports, each configured to support an imprint template, wherein the plurality of imprint template supports is configured for the imprint templates to operate in parallel to each other.
Dependencies are inferred from the claim text.