Substrate holder, substrate holder unit, substrate transport apparatus, and substrate bonding apparatus

A substrate holder for holding a substrate by means of electrostatic force generated by power supplied from an external source, the substrate holder to be transported in a state of holding the substrate, the substrate holder comprising:

• a holder body that is to have the substrate placed thereon;
• and
• a connector terminal that is externally exposed, the connector terminal being attachable to and detachable from an external power supply terminal, wherein
• the substrate holder is transported in a state of being stacked on a different substrate holder that has a different connector terminal attachable to and detachable from an external power supply terminal, and
• the substrate holder further comprises
• an exposing section that, while the substrate holder is in the state of being stacked on the different substrate holder, externally exposes the connector terminal of the different substrate holder.

A substrate holder unit to be transported in a state of holding a plurality of substrates therein, the substrate holder unit comprising:

• a first substrate holder that holds one of the plurality of substrates by means of electrostatic force generated by power supplied from an external source;
• and
• a second substrate holder that holds the other of the plurality of substrates by means of electrostatic force generated by power supplied from an external source, wherein
• the first and second substrate holders each include:
• a holder body that is to have the substrate placed thereon;
• a connector terminal that is externally exposed to outside the holder body through a first surface of the holder body and a second surface of the holder body, the connector terminal operable to receive power supplied from an external power supply terminal via the first surface and operable to receive power supplied from an external power supply terminal via the second surface.

A substrate holder to be transported in a state of holding a substrate, the substrate holder comprising:

• a holder body that is to have the substrate placed thereon;
• an electrode that is provided on the holder body, the electrode using power supplied from outside the holder body to generate an adsorbing force to adsorb the substrate;
• a first terminal that is electrically connected to the electrode and is externally exposed to outside the holder body through a first surface of the holder body, the first terminal operable to receive power supplied from outside the holder body via the first surface;
• and
• a second terminal that is electrically connected to the electrode and the first terminal and is externally exposed to outside the holder body through a second surface of the holder body, the second terminal operable to receive power supplied from outside the holder body via the second surface.

A substrate holder to be transported in a state of holding a substrate, the substrate holder comprising:

• a holder body that is to have the substrate placed thereon;
• an electrode that is provided on the holder body, the electrode using power supplied from outside the holder body to generate an adsorbing force to adsorb the substrate;
• a first terminal that is electrically connected to the electrode, the first terminal operable to receive power supplied from outside the holder body via a first surface of the holder body;
• and
• a second terminal that is electrically connected to the electrode and the first terminal, the second terminal operable to receive power supplied from outside via a second surface of the holder body, wherein
• the substrate holder is transported in a state of being stacked on a different substrate holder that has a connector terminal attachable to and detachable from an external power supply terminal, and
• the substrate holder further comprises
• an exposing section that, while the substrate holder is in the state of being stacked on the different substrate holder, externally exposes the connector terminal of the different substrate holder.

A substrate holder for holding a substrate by means of electrostatic force generated by power supplied from an external source, the substrate holder to be transported in a state of holding the substrate, the substrate holder comprising:

• a holder body that is to have the substrate placed thereon;
• and
• a connector terminal that is externally exposed, the connector terminal being attachable to and detachable from an external power supply terminal, wherein
• the substrate holder is transported in a state of being stacked on a different substrate holder that has a connector terminal attachable to and detachable from an external power supply terminal, and
• the substrate holder further comprises
• a power access section that, while the substrate holder is in the state of being stacked on the different substrate holder, allows the connector terminal of the different substrate holder to access a power supply.

A substrate holder to be transported in a state of holding a substrate, the substrate holder comprising:

• a holder body that is to have the substrate placed thereon;
• an electrode that is provided on the holder body, the electrode using power supplied from outside the holder body to generate an adsorbing force to adsorb the substrate;
• a first terminal that is electrically connected to the electrode, the first terminal operable to receive power supplied from outside the holder body via a first surface of the holder body;
• and
• a second terminal that is electrically connected to the electrode and the first terminal, the second terminal operable to receive power supplied from outside via a second surface of the holder body, wherein
• the substrate holder is transported in a state of being stacked on a different substrate holder that has a connector terminal attachable to and detachable from an external power supply terminal, and
• the substrate holder further comprises
• a power access section that, while the substrate holder is in the state of being stacked on the different substrate holder, allows the connector terminal of the different substrate holder to access a power supply.