Microactuator, optical device and exposure apparatus, and device manufacturing method
AssigneeNikon Corporation
InventorsSoichi Owa, Junji Suzuki
Life of this patent
Estimating the term…
Abstract
A pair of support members each having a spring section in a part thereof support a mirror element, and a pair of drive mechanisms arranged respectively corresponding to a pair of the support members transform the spring sections of the corresponding support members, thereby changing a distance between each of support points at which the support members support the mirror element and a base. Accordingly, the mirror element can be translated by driving all of the drive mechanisms, or the mirror element can be inclined with respect to the base by driving some of the drive mechanisms.
Claims15
A microactuator that drives a driven body, the microactuator comprising:
- a support member having
- a pair of elastic sections,
- a coupling section that couples the elastic sections, and
- a connecting section that connects the coupling section and the driven body together;
- and
- a pair of drive mechanisms that are arranged respectively corresponding to the pair of the elastic sections, wherein each drive mechanism of the pair of the drive mechanisms transforms the corresponding elastic section to thereby change at least one of an attitude and an altitude of the driven body,
- wherein the connecting section is a single connecting section that connects the coupling section and the driven body together so that the driven body is supported at only one point.
Dependencies are inferred from the claim text.