Piezoelectric mirror device, optical equipment incorporating the same, and piezoelectric mirror device fabrication process

A piezoelectric mirror device, comprising:

• a frame portion having a centrally located opening;
• a pair of drive portions that each have a multilayer structure of a lower electrode, a piezoelectric element and an upper electrode and are located at said frame portion;
• a mirror portion positioned at said opening;
• and a pair of mirror support portions adapted to support said mirror portion rotatably relative to said frame portion depending on operation of said drive portions, said drive portions being configured to rotate the mirror portion via the mirror support portions, and a center axis of the mirror support portions coincides with a location of the drive portions,
• wherein said mirror portion, said mirror support portions, and said upper electrode are formed integrally such that they are formed continuously of an electrically conductive material having a Young's modulus of up to 160 GPa, and said frame portion includes a cutout or thinner portion at a part of a site where there are said drive portions positioned, wherein said cutout or thinner portion is in contact with said opening.