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US 8,570,529 B2Granted
Device for position detection
AssigneeAttocube Systems AG
InventorKhaled Karrai
Life of this patent
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Abstract
An apparatus for position finding, including a light source to produce a wave field in a measurement section, a wave field variation device to generate a variation of a wavelength of the wave field over time, an interferometer to produce an interference pattern for the wave field which is dependent on the length of the measurement section, a detector to produce a measurement signal on the basis of the detected interference pattern, and an evaluation circuit to evaluate the measurement signal on the basis of the variation over time.
Claims7
A positioner, comprising:
- a first fixed-position part;
- a second movable part that is configured to be displaced relative to the first fixed-position part;
- a position adjusting device, acting between the first fixed-position part and the second movable part, to displace the second movable part relative to the first fixed-position part, the position adjusting device comprising a slip-stick drive and being configured to displace the second movable part relative to the first fixed-position part over a path length of at least several millimeters;
- and
- a Fabry-Perot interferometer, wherein an interferometer head of the Fabry-Perot interferometer is mounted on the first fixed-position part and light emitted from the interferometer head is reflected back to the interferometer head from the second movable part, and wherein a finesse of the Fabry-Perot interferometer is less than 10.0, particular less than 5.0, more particular less than 1.0 or still more particular less than 0.5.
2 more elements
An arrangement, comprising:
- a positioner, the positioner including:
- a first fixed-position part;
- a second movable part that is configured to be displaced relative to the first fixed-position part;
- and
- a position adjusting device, acting between the first fixed-position part and the second movable part, the position adjusting device comprising a slip-stick drive and being configured to displace the second movable part relative to the first fixed-position part over a path length of at least several millimeters;
- and
- a position finding device to monitor the positioning movement of the positioner, the position finding device including:
- a light source to produce a wave field in a measurement section of the positioner;
- a wave field variation device to generate a variation of a wavelength of the wave field over time;
- a Fabry-Perot interferometer to produce an interference pattern for the wave field which is dependent on the length of the measurement section;
- a detector to produce a measurement signal on the basis of the detected interference pattern;
- and
- an evaluation circuit to evaluate the measurement signal on the basis of the variation over time.
10 more elements
Dependencies are inferred from the claim text.