US 8,570,502 B2Granted

Scanning mirror device

AssigneeCarl Zeiss AG

InventorsStefan Richter, Veljko Milanovic, Günter Rudolph, Michel Stutz, Gerhard Krampert

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Abstract

There is provided a scanning mirror device with a microsystem scanning mirror which is mounted rotatably about at least one axis, and a detection module which has a light source which emits a light beam, and a position detector, wherein the detection module directs the light beam onto the scanning mirror from behind, with the result that the light beam is reflected, at the back of the scanning mirror, to the position detector which measures the position of the reflected light beam, from which the rotation angle of the scanning mirror about the at least one axis can be deduced.

Claims16

Dependent claims

A scanning mirror device, comprising:

a MEMS microsystem scanning mirror rotatably mounted about at least one axis to the scanning mirror device;
and
a detection module, including a light source which emits a light beam, a position detector, imaging optics configured to focus the light beam onto the back of the scanning mirror, and projection optics configured to image the light beam reflected by the back of the scanning mirror as a collimated light beam onto the position detector,
wherein the detection module directs the light beam onto the scanning mirror from behind, with the result that the light beam is reflected, at the back of the scanning mirror, to the position detector which measures the position of the reflected light beam, from which the rotation angle of the scanning mirror about the at least one axis can be deduced.

1 more element

Dependencies are inferred from the claim text.

Facts

Application: 13/400,504Filed 20 Feb 2012 · us provisional application
Priority: DE 10 2011 004 47721 Feb 2011
Published: US 2012/0300197 A129 Nov 2012
Granted: 29 Oct 2013
Term ends: Not estimatedThe source records don’t support an estimate.

Classification4 codes

G01B 11/26
Measuring arrangements characterised by the use of optical techniques: for measuring angles or tapers; for testing the alignment of axes
G02B 26/105
Scanning systems: with one or more pivoting mirrors or galvano-mirrors
G01B
Measuring length, thickness or similar linear dimensions
G02B
Optical elements, systems or apparatus

Family

Application61/444,846Us provisional application · filed 21 Feb 2011
US 2012/0300197 A1Pre-grant publication · published 29 Nov 2012
US 8,570,502 B2This patent

From the US filing history. Foreign family members aren’t listed.

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