Immersion exposure apparatus, device manufacturing method, cleaning method, and cleaning member to remove foreign substance using liquid

A cleaning method of a liquid immersion exposure apparatus that exposes a substrate with exposure light, the method comprising:

• holding a plate member by a holding section of a substrate stage that can hold the substrate;
• during a cleaning operation, confining a liquid between a first member and the plate member, thereby a liquid immersion space being formed on a portion of an upper surface of the plate member, the surface area of the portion being less than the surface area of the upper surface;
• after forming the immersion space, varying at least one of a supply rate and a recovery rate of the liquid during the cleaning operation, thereby varying a volume of the liquid confined between the first member and the plate member, such that vibrations of an interface of the liquid between the first member and the portion of the upper surface of the plate member are caused, in order to remove a foreign substance from the first member;
• and
• unloading the plate member from the substrate stage.