Optical filter, solid-state imaging element having the filter, and imaging apparatus
AssigneeCanon Kabushiki Kaisha
InventorsTomohiro Yamada, Ryo Kuroda
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Abstract
An optical filter includes a substrate, and a periodic structure in which a plurality of members formed of silicon are periodically arranged on a surface of the substrate. The filter selectively transmits light of a first wavelength included in light incident on the periodic structure in the direction of the substrate. The members are two-dimensionally arranged with a period of 400 nm to 500 nm. The dimension of the members in the direction parallel to the surface is of 120 nm to 160 nm. A local maximum value of the transmission spectrum of the first wavelength is within the range of 400 nm to 500 nm.
Claims15
A transmissive optical filter comprising:
- a substrate;
- and
- a first region in which a plurality of first members formed of silicon are periodically arranged on a surface of the substrate,
- wherein the first members are two-dimensionally arranged on the first region with a period of 400 nm to 500 nm, a dimension of each of the first members in a direction parallel to the surface of the substrate is 120 nm to 160 nm, and the first region has a local maximum value of a transmission spectrum within 400 nm to 500 nm.
Dependencies are inferred from the claim text.