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US 8,569,934 B2Granted
Piezo-resistive MEMS resonator
AssigneeNXP B.V.
InventorsGerhard Koops, Jozef Thomas Martinus van Beek
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Abstract
A piezo-resistive MEMS resonator comprising an anchor, a resonator mounted on the anchor, an actuator mounted to apply an electrostatic force on the resonator and a piezo-resistive read-out means comprising a nanowire coupled to the resonator.
Claims12
A piezo-resistive MEMS resonator comprising:
- an anchor,
- an actuator mounted to apply an electrostatic force
- a piezo-resistive read-out means including a nanowire configured and arranged to measure resistance of a current path,
- a current source configured and arranged to provide a current to the current path from the nanowire through the anchor, and
- a resonator body mounted on the anchor and coupled to the piezo-resistive read-out means, the resonator body being configured and arranged to vibrate in response to the electrostatic force applied by the actuator and effect the current in the nanowire,
- wherein the resonator body has an area of at least 100 μm2 and the nanowire has a cross section of at most 5000 nm2.
3 more elements
Dependencies are inferred from the claim text.