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US 8,569,741 B2Granted
Electronic arrangements for passivated silicon nanowires
AssigneeCalifornia Institute of Technology
InventorsAxel Scherer, Sameer Walavalkar, Michael D. Henry, Andrew P. Homyk
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Abstract
Methods for fabricating passivated silicon nanowires and an electronic arrangement thus obtained are described. Such arrangements may comprise a metal-oxide-semiconductor (MOS) structure such that the arrangements may be utilized for MOS field-effect transistors (MOSFETs) or opto-electronic switches.
Claims12
An electronic arrangement comprising:
- a plurality of insulator covered semiconductor nanoscale pillar structures substantially perpendicular to a planar surface;
- a conductive layer coated on the insulator covered semiconductor nanoscale pillar structures, wherein the conductive layer and the insulator layer are devoid of an end portion thereof, so that end portions of the nanoscale pillar structures are electrically accessible;
- the arrangement further comprising:
- a dielectric material coated on the planar surface;
- and
- a further conductive layer coated on the dielectric material and accessible portions of the nanoscale pillar structures, wherein direct contact between the conductive layer and the further conductive layer is absent, and wherein the insulator covered semiconductor nanoscale pillar structures extend inside the further conductive layer.
3 more elements
An electronic arrangement comprising:
- an insulator covered semiconductor substrate;
- a plurality of nanoscale pillar structures on the substrate, substantially perpendicular to a planar surface;
- and
- a conductive layer covering the insulator and the nanoscale pillar structures, wherein the conductive layer is devoid of an end portion thereof, so that end portions of the nanoscale pillar structures are electrically accessible;
- a dielectric material coated on a planar surface;
- a further conductive layer coated on the dielectric material and accessible portions of the nanoscale pillar structures, wherein direct contact between the conductive layer and the further conductive layer is absent, and wherein the nanoscale pillar structures extend inside the further conductive layer.
3 more elements
An electronic arrangement comprising:
- a plurality of insulator covered semiconductor nanoscale pillar structures substantially perpendicular to a planar surface, wherein the insulator layer is devoid of an end portion thereof, so that end portions of the nanoscale pillar structures are electrically accessible;
- the arrangement further comprising:
- a dielectric material coated on the planar surface;
- and
- a further conductive layer coated on the dielectric material and accessible portions of the nanoscale pillar structures, wherein the semiconductor nanoscale pillar structures extend inside the further conductive layer, and wherein the insulator layer does not extend inside the further conductive layer.
2 more elements
Dependencies are inferred from the claim text.