Nonvolatile memory device and method for manufacturing same
AssigneeKabushiki Kaisha Toshiba
InventorsTakuya Konno, Hiroyuki Fukumizu, Kazuhito Nishitani
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AssigneeKabushiki Kaisha Toshiba
InventorsTakuya Konno, Hiroyuki Fukumizu, Kazuhito Nishitani
Estimating the term…
A nonvolatile memory device includes: at least one first interconnection extending in a first direction; at least one second interconnection disposed above the first interconnection and extending in a second direction nonparallel to the first direction; a memory cell disposed between the first interconnection and the second interconnection at an intersection of the first interconnection and the second interconnection and including a memory element; and an element isolation layer disposed between the memory cells. At least one dielectric film with a higher density than the element isolation layer is disposed on a sidewall surface of the memory cell.
A nonvolatile memory device comprising:
Dependencies are inferred from the claim text.