Induction heated buffer gas heat pipe for use in an extreme ultraviolet source
AssigneePlex LLC
InventorMalcolm W. McGeoch
Life of this patent
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Abstract
The successful use of lithium vapor in an extreme ultraviolet (EUV) light source depends upon an intense localized heat source at the center of conical structures that evaporate, condense and re-supply liquid lithium. Induction heating of a hollow structure with toroidal topology via an internal helical field coil, can supply intense heat at its innermost radius. The resulting slim radio frequency heated structure has high optical transmission from a central EUV producing plasma to collection mirrors outside of the structure, improving EUV source efficiency and reliability.
Claims9
A buffer gas heat pipe for the containment of metal vapor comprising a plurality of hollow disc-shaped or conical structures of toroidal topology collectively immersed in a buffer gas, each structure containing an internal helical coil powered by a radio-frequency current to induce a skin effect heating current that flows in loops defined by radial sections of the structure, with the most intense delivery of heat at the least radius of the structure.
Dependencies are inferred from the claim text.