Extreme ultraviolet light generation apparatus

An extreme ultraviolet light generation apparatus, which generates extreme ultraviolet light by irradiating a target material with a laser pulse based on a trigger signal outputted from an exposure apparatus, comprising:

• a chamber;
• a target supply unit configured for outputting a target material into the chamber;
• a laser apparatus configured for outputting a laser pulse into the chamber;
• a timer configured for timing;
• a first storage unit configured for storing a parameter log of burst-outputted extreme ultraviolet light;
• an EUV light detector configured for detecting energy of the extreme ultraviolet light generated by irradiating the target material with the laser pulse;
• and
• a controller configured for outputting a control signal to the laser apparatus and for determining whether or not the trigger signal is a burst signal, in which successive outputting of trigger signals during a predetermined period and resting of outputting the trigger signals after the successive outputting are repeated alternately, based on a temporal interval of the trigger signals measured by the timer, and when the trigger signal is the burst signal executing a burst control in which the control signal is successively outputted to the laser apparatus, wherein
• the controller switches a learning control based on the parameter log stored in the first storage unit and a feedback control based on energy of a last extreme ultraviolet light detected by the EUV light detector during a period of burst control.