US 8,569,721 B2 · Extreme ultra violet light source apparatus

Abstract

In an LPP type EUV light source apparatus, the intensity of radiated EUV light is stabilized by improving the positional stability of droplets. The extreme ultra violet light source apparatus includes: a chamber in which extreme ultra violet light is generated; a target supply division including a target tank for storing a target material therein and an injection nozzle for injecting the target material in a jet form, for supplying the target material into the chamber; a charging electrode applied with a direct-current voltage between the target tank and itself, for charging droplets when the target material in the jet form injected from the injection nozzle is broken up into the droplets; a laser for applying a laser beam to the droplets of the target material to generate plasma; and a collector mirror for collecting extreme ultra violet light radiated from the plasma to output the extreme ultra violet light.

Claims9

Dependent claims

An extreme ultra violet light source apparatus for generating extreme ultra violet light from plasma generated by irradiating a target material supplied to a region with a laser beam introduced from an external unit, said apparatus comprising:

a chamber in which the plasma is generated;
a target supply division for supplying the target material to the region within said chamber, including a nozzle for supplying a stream of the target material into said chamber, at least a part of said nozzle having an electric insulation property, and including a target tank for pressurizing the target material stored therein with a gas to supply the target material to said nozzle, a potential of said target tank being set to a ground potential;
a charging electrode disposed between said nozzle and said region;
a power supply and control unit for applying a voltage between said target tank and said charging electrode;
a collector mirror for collecting extreme ultra violet light from the plasma to output the extreme ultra violet light;
and
a target collecting unit for collecting the target material.

4 more elements

Dependencies are inferred from the claim text.

Extreme ultra violet light source apparatus

Life of this patent

Extreme ultra violet light source apparatus

Life of this patent

Abstract

Claims9