Method and apparatus for specimen fabrication

A focused ion beam apparatus, comprising:

• a sample stage for mounting a specimen;
• an ion beam irradiating optical system for irradiating a focused ion beam to the specimen;
• a deposition-gas supplying source for supplying a deposition gas used for forming a deposition film at an area to be irradiated with the focused ion beam;
• a sample holder provided with a fixing surface for fixing, via the deposition film, a micro-specimen separated from the specimen using a method for fabrication by the focused ion beam, in which a dent with depth of at least 20 microns is not provided on the fixing surface of said sample holder;
• a specimen transferring unit having a probe to which the specimen can be joined through the deposition film, and transferring the micro-specimen separated from the specimen by the focused ion-beam fabrication method, to said sample holder;
• and
• a sample chamber in which said sample, said sample holder and at least a portion of said probe are laid out,
• wherein, in said sample chamber, the micro-specimen separated from the specimen by the focused ion-beam fabrication method is fixed to the fixing surface of said sample holder through the deposition film, and the micro-specimen fixed to the fixing surface is fabricated by irradiating the focused ion beam.

A focused ion beam apparatus, comprising:

• a sample stage for mounting a specimen;
• an ion beam irradiating optical system for irradiating a focused ion beam to the specimen;
• a deposition-gas supplying source for supplying a deposition gas used for forming a deposition film at an area to be irradiated with the focused ion beam;
• a sample holder provided with a fixing surface for fixing, via the deposition film, a micro-specimen separated from the specimen using a method for fabrication by the focused ion beam, in which a width of the fixing surface is smaller than 50 microns, and the fixing surface is flat so that the separated micro-specimen fixed to the fixing surface is not embedded in a dent on the fixing surface;
• a specimen transferring unit having a probe to which the specimen can be joined through the deposition film, and transferring the micro-specimen separated from the specimen by the focused ion-beam fabrication method, to said sample holder;
• and
• a sample chamber in which said sample, said sample holder and at least a portion of said probe are laid out,
• wherein, in said sample chamber, the micro-specimen separated from the specimen by the focused ion-beam fabrication method is fixed to the fixing surface of said sample holder through the deposition film, and the micro-specimen fixed to the fixing surface is fabricated by irradiating the focused ion beam.