Distortion free stigmation of a TEM
AssigneeFEI Company
InventorsMaarten Bischoff, Alexander Henstra, Uwe Luecken, Peter Christiaan Tiemeijer
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Abstract
A charged particle apparatus is equipped with a third stigmator positioned between the objective lens and a detector system, as a result of which a third degree of freedom is created for reducing the linear distortion. Further, a method of using said three stigmators, comprises exciting the first stigmator to reduce astigmatism when imaging the sample, exciting the second stigmator to reduce astigmatism when imaging the diffraction plane, and exciting the third stigmator to reduce the linear distortion.
Claims14
A charged particle apparatus equipped with a charged particle source for emitting a beam of charged particles, downstream of said beam followed by condenser optics, followed by a sample position, followed by an objective lens, followed by imaging optics, and followed by a detector system, in which, between the objective lens and the detector system, a first stigmator is positioned for reducing astigmatism when imaging a sample on the detector system and a second stigmator is positioned for reducing astigmatism when the diffraction plane is imaged on the detector system, characterized in that a third stigmator is positioned between the objective lens and the detector system, as a result of which a third degree of freedom is created for reducing the linear distortion.
A charged particle apparatus, comprising:
- a charged particle source for emitting a beam of charged particles;
- a sample holder for holding a sample and positioning the sample with respect to the beam of charged particles;
- a first stigmator positioned for reducing astigmatism when imaging the sample;
- a second stigmator positioned for reducing astigmatism when imaging the diffraction plane;
- and
- a third stigmator positioned for reducing linear distortion.
Dependencies are inferred from the claim text.