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US 8,569,677 B2Granted
Devices useful for vacuum ultraviolet beam characterization including a movable stage with a transmission grating and image detector
AssigneeThe Regents of the University of California
InventorsOliver Gessner, Oleg A. Kornilov, Russell B. Wilcox
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Abstract
The invention provides for a device comprising an apparatus comprising (a) a transmission grating capable of diffracting a photon beam into a diffracted photon output, and (b) an image detector capable of detecting the diffracted photon output. The device is useful for measuring the spatial profile and diffraction pattern of a photon beam, such as a vacuum ultraviolet (VUV) beam.
Claims15
An apparatus for characterizing a photon beam comprising:
- a movable stage,
- a transmission grating configured to diffract the photon beam into a diffracted photon output,
- an image detector configured to detect the diffracted photon output,
- a reflective surface, and
- an image recorder, wherein the transmission grating, the image detector, and the reflective surface are each connected to the movable stage, wherein the movable stage is configured to be positioned in a first position and a second position, wherein in the first position the photon beam bypasses the apparatus, and wherein in the second position the photon beam contacts the transmission grating.
2 more elements
A method for characterizing a photon beam, comprising:
- (a) generating the photon beam,
- (b) providing an apparatus, the apparatus comprising:
- a movable stage,
- a transmission grating configured to diffract the photon beam into a diffracted photon output,
- an image detector configured to detect the diffracted photon output,
- a reflective surface, and
- an image recorder, wherein the transmission grating, the image detector, and the reflective surface are each connected to the movable stage,
- (c) moving the movable stage from a first position where the photon beam bypasses the apparatus into a second position where the photon beam contacts the transmission grating, and
- (d) recording the diffracted photon output from the transmission grating with the image recorder.
6 more elements
Dependencies are inferred from the claim text.