US 8,569,647 B2 · Heat treatment apparatus

Abstract

Provided is a heat treatment apparatus in which a heat treatment apparatus in which the thermal efficiency is high, the maintenance expense is low, the throughput is high, the surface roughness of a sample can be reduced, and the discharge uniformity is excellent, although the heat treatment is performed at 1200 ° C. or more. A heat treatment apparatus includes: parallel planar electrodes; a radio-frequency power supply generating plasma by applying radio-frequency power between the parallel planar electrodes; a temperature measuring section measuring the temperature of a heated sample; and a control unit controlling an output of the radio-frequency power supply, wherein at least one of the parallel planar electrodes has a space where the heated sample is installed, therein, and heats the sample in the electrode by the plasma generated between the parallel planar electrodes.

Claims14

Dependent claims

A heat treatment apparatus, comprising:

a heat processing chamber for heat processing a sample to be heated;
a plate electrode disposed in the heat processing chamber;
a first electrode disposed in the heat processing chamber so as to face the plate electrode so that plasma generates between first electrode and the plate electrode;
a second electrode on which the sample to be heated is mounted, and is disposed in the processing chamber so as to face the plate electrode across the first electrode;
and
a radio-frequency power supply which supplies radio-frequency power to the plate electrode to generate plasma;
wherein the plate electrode, the first electrode and the second electrode are made of a graphite base material;
wherein the first electrode is electrically connected to the second electrode when the radio-frequency power is supplied to the plate electrode;
and
wherein the second electrode has a space where the sample to be heated is installed, and the second electrode is grounded through a feed line.

7 more elements

Dependencies are inferred from the claim text.

Heat treatment apparatus

Life of this patent

Heat treatment apparatus

Life of this patent

Abstract

Claims14