Method for producing a semiconductor device with a semiconductor body

A method for the production of a semiconductor device with a semiconductor body having drift zones of a first conduction type and charge compensation zones of a complementary conduction type, the method comprising:

• a) providing a semiconductor wafer as a semiconductor substrate;
• b) applying an epitaxial layer in a first epitaxial growth phase, during which the semiconductor material is in the process of epitaxial growth doped on the semiconductor wafer with 20 to 80 atomic % of a total implanted doping material of the first conduction type;
• c) unmasked ion implantation of doping material of the first conduction type for the near-surface introduction of a doping material balance of 80 to 20 atomic % of the total dopant implanted into the epitaxial layer;
• d) masked ion implantation for a charge compensation zone structure with a doping complementary to the drift zone;
• e) repeating steps b) to d) until a predetermined epitaxial layer thickness is reached;
• f) indiffusing of the doping materials for the drift zones and the charge compensation zones until coherent charge compensation zones are generated;
• g) completing of a semiconductor chip structure for power semiconductor devices on the semiconductor wafer;
• and
• wherein the doping with 20 to 80 atomic % of the total dopant implanted of the doping material of the first conduction type is carried out with inhomogeneous distribution during the application of the epitaxial layer in the epitaxially grown semiconductor material in such a way that a maximum of the concentration of doping material is introduced into the semiconductor material in a middle region of an individual epitaxial growth phase.