Positive photosensitive resin composition
AssigneeCheil Industries Inc.
InventorsDoo-Young Jung, Ji-Young Jeong, Hyun-Yong Cho, Yong-Sik Yoo, Kil-Sung Lee, Myoung-Hwan Cha
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Abstract
A positive photosensitive resin composition according to one embodiment of the present invention includes a polyamic acid or a polyamic acid ester compound including a repeating unit represented by Formula 1 defined in this specification, a photosensitive diazoquinone compound, a silane compound, a phenol compound, and a solvent. The positive photosensitive resin composition can be cured at a low temperature of 260° C. or less, and can have high sensitivity, resolution, residue removal, substrate adherence, and pattern-forming capabilities, and low film shrinkage.
Claims10
A positive photosensitive resin composition, comprising:
- (A) a polyamic acid or polyamic acid ester compound including a repeating unit represented by the following Formula 1;
- (B) a photosensitive diazoquinone compound;
- (C) a silane compound;
- (D) a phenol compound;
- and
- (E) a solvent,
- wherein in the above Formula 1,
- Ra, Rb, Rc, Rd, Re, and Rf are the same or different and are independently hydrogen or a monovalent organic group,
- R1 and R2 are the same or different and are independently a single bond or substituted or unsubstituted alkylene,
- a′, b′, c′, d′, e′, and f′ are the same or different and are independently 0 or 1, a′+b′+c′ and d′+e′+f are integers of 2 or 3, respectively,
- Y1 and Y2 are the same or different and are independently a substituted or unsubstituted alicyclic organic group, derived from one of the compounds represented by the following Chemical Formulae 6 or 8:
- wherein in the above Formula 8,
- A2 is O, CR14R15, CO, CONH, S, or SO2, wherein R14 and R15 are the same or different and are independently substituted or unsubstituted alkyl, hydrogen, or fluoroalkyl,
- X1 is substituted or unsubstituted arylene, substituted or unsubstituted alkylene, or substituted or unsubstituted cycloalkylene,
- X2 is a divalent to a quadrivalent aromatic or aliphatic organic group, or is a functional group represented by the following Formula 2,
- m1 and m2 are mole ratios,
- m1+m2=100 mol %,
- m1 ranges from 60 to 100 mol %, and
- m2 ranges from 0 to 40 mol %:
- wherein in the above Formula 2,
- R3, R4, R′3 and R′4 are the same or different and are independently substituted or unsubstituted alkyl, substituted or unsubstituted aryl, substituted or unsubstituted alkoxy, or hydroxy,
- R5 and R6 are the same or different and are independently substituted or unsubstituted alkylene or substituted or unsubstituted arylene, and
- k is an integer ranging from 1 to 50.
Dependencies are inferred from the claim text.